Rare Cell Immobilization on MEMS Scale Sensors Using Micro-Electromagnets

MEMS Sensors and Microsystems for Cell Mechanobiology.

Forces generated by cells play a vital role in many cellular processes like cell spreading, motility, differentiation and apoptosis. Understanding the mechanics of single cells is essential to delineate the link between cellular force generation/sensing and function. MEMS sensors, because of their small size and fine force/displacement resolution, are ideal for force and displacement sensing at...

Direction Finding Using Multiple Mems Acoustic Sensors

A Mems Microphone Using Repulsive Force Sensors

We present a MEMS microphone that converts the mechanical motion of a diaphragm, generated by acoustic waves, to an electrical output voltage by capacitive fingers. The sensitivity of a microphone is one of the most important properties of its design. The sensitivity is proportional to the applied bias voltage. However, it is limited by the pull-in voltage, which causes the parallel plates to c...

Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts

The effect of accidental drops on MEMS sensors are examined within the frame-work of a multi-scale finite element approach. With specific reference to a polysilicon MEMSaccelerometer supported by a naked die, the analysis is decoupled into macro-scale (at dielength-scale) and meso-scale (at MEMS length-scale) simulations, accounting for the verysmall inertial contribution of the sensor to the o...

Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress

In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stres...